M. Grewe et al., Theoretical and experimental investigations of the optical waveguiding properties of on-chip microfabricated capillaries, APP PHYS B, 70(6), 2000, pp. 839-847
An on-chip capillary system with potential applications in miniaturized ana
lytical chemistry and spectroscopy setups has been microfabricated using ph
otolithographic, etching, and aligned bonding techniques. The optical waveg
uiding properties of the capillary are investigated theoretically and exper
imentally. Chip insertion losses as low as 3 dB at 0.514 mu m wavelength ha
ve been measured for a 15-mm-long water-filed capillary waveguide with 63 m
u m internal diameter.