The acronym MEMSTIC is the short form of Multi Element Multi Substrate Tera
hertz integrated Circuit and is for a new, for some years developed circuit
concept, in which different circuit functions (e.g oscillations producing,
filtering or amplifying) are performed by different substrates which are o
nly connected by the field of a beam waveguide. In the plain of a substrate
many items (10 bis 10(4)) at the same function operate synchronously in ph
ase. They are not coupled among themselves but by their antenna elements wi
th the electromagnetic field before and behind the substrate. The paper wan
ts to give an overview over the background for this concept, over the circu
it connection and the possible multi-element components as well as the meas
urement problems.