Aerosol formation under heterogeneous/homogeneous thermal decomposition ofsilane: Experiment and numerical modeling

Experimental and numerical study of aerosol Formation under heterogeneous/h omogeneous silane thermal decomposition is carried out. Experimental explor ation included monitoring of the following parameters during silane decompo sition: silane conversion degree and concentrations of disilane and trisila ne; aerosol concentration; size and morphology of aerosol particles; number of monohydride SiH and polyhydride (SiH2)(n) groups in aerosol particles; number of dangling bond active centers in aerosol particles. To explain the experimental results, a numerical model was developed. It covered homogene ous reactions (involving 11 gaseous species), heterogeneous reactions of si licon wall deposition from gaseous species, aerosol formation and aerosol p article wall deposition. The modeling results are in reasonable agreement w ith the experimental data. (C) 2000 Elsevier Science Ltd. All rights reserv ed.