Citation
D. Zaouk et al., Fabrication of tin oxide (SnO2) thin film by electrostatic spray pyrolysis, MICROEL ENG, 51-2, 2000, pp. 627-631
Citations number
6
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
MICROELECTRONIC ENGINEERING
ISSN journal
01679317
→ ACNP
Volume
51-2
Year of publication
2000
Pages
627 - 631
Database
ISI
SICI code
0167-9317(200005)51-2:<627:FOTO(T>2.0.ZU;2-F
Abstract
Electrostatic spray pyrolysis (ESP) technique has been used for thin film d
eposition of fluorine-doped tin oxide, which is used for optoelectronic app
lications. The results show that films are polycrystalline, highly conducti
ve (rho = 9.3 x 10(-4) Omega cm), and have a high transmission (85%) in the
visible range. (C) 2000 Elsevier Science B.V. All rights reserved.