Pd atoms are released into PMMA by thermal decomposition of a suitable orga
nometallic compound dissolved in the polymer beforehand. These atoms eventu
ally precipitate in ion-irradiated polymer regions. After Ar+ ion implantat
ion, metallic enrichment by up to a factor 4.5 in concentration could be ac
hieved. We tend to attribute this Pd enrichment to gettering at the Ar gas
bubbles. (C) 2000 Elsevier Science B.V. All rights reserved.