40 keV Fe+ and Co+ ions were implanted in both viscous and solid silicone s
ubstrates at doses of (0.1-1.8) x 10(17) ions/cm(2) and an ion current dens
ity of 4 mu A/cm(2). The microstructure and magnetic properties of the Fe-
and Co-implanted silicons layers were then investigated as a function of th
e initial relaxation state (viscosity) of the polymer target. TEM investiga
tions showed that granular Fe and Co films consisting of fine isolated part
icles are synthesized in the solid substrates at doses higher than 0.3 x 10
(17) ions/cm(2). At the same dose multiparticle iron agglomerates and close
ly packed large Co particles with a mean size of 200 nm are formed in subst
rates implanted in the viscous state. FRAP studies revealed essential diffe
rences in the magnetic properties of the metal films synthesized at differe
nt viscosity of the silicone substrate. The temperature dependence of the F
MR spectra and the dose dependence of the effective magnetization of the sy
nthesized films were studied. (C) 2000 Elsevier Science B.V. All rights res
erved.