Method of the ratio of envelopes of the reflection spectrum for measuring optical constants and thickness of thin films

Authors
Citation
Vv. Filippov, Method of the ratio of envelopes of the reflection spectrum for measuring optical constants and thickness of thin films, OPT SPECTRO, 88(4), 2000, pp. 581-585
Citations number
19
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences
Journal title
OPTICS AND SPECTROSCOPY
ISSN journal
0030400X → ACNP
Volume
88
Issue
4
Year of publication
2000
Pages
581 - 585
Database
ISI
SICI code
0030-400X(200004)88:4<581:MOTROE>2.0.ZU;2-0
Abstract
A spectrophotometric method is proposed that uses the ratio of envelopes of minima and maxima of the interference reflection spectrum for measuring op tical constants of a film on a substrate. Because this ratio does not conta in the instrumental function of a spectrophotometer, there is no need in ca reful calibration of the spectrophotometer. In the case of a transparent is otropic film on an absorbing substrate, the inverse problem has an analytic solution. A simple method is proposed for numerical calculations of the op tical constants and thickness of an absorbing film. (C) 2000 MAIK "Nauka/In terperiodica".