Mesoscopic electronic devices made by local oxidation of a Ti/Au bilayer film

The technique of field-induced local oxidation with the tip of an atomic fo rce microscope can be used to pattern non-noble metal thin films by creatin g insulating regions. We have studied the technique (oxide line width, oxid ation thickness, etc.) in order to fabricate mesoscopic electronic devices. Ti thin film structures have been patterned as well as more complicated st ructures where the Ti covers gold islands. (C) 2000 Elsevier Science B.V. A ll rights reserved.