Microfabrication of silicon vibrating wires

Authors
Triqueneaux, S Collin, E Cousins, DJ Fournier, T Bauerle, C Bunkov, YM Godfrin, H
Citation
S. Triqueneaux et al., Microfabrication of silicon vibrating wires, PHYSICA B, 284, 2000, pp. 2141-2142
Citations number
5
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
PHYSICA B
ISSN journal
09214526 → ACNP
Volume
284
Year of publication
2000
Part
2
Pages
2141 - 2142
Database
ISI
SICI code
0921-4526(200007)284:<2141:MOSVW>2.0.ZU;2-8
Abstract
Superconducting vibrating wires are widely used in low-temperature measurem ents. We report on the fabrication of silicon micromechanical resonators co vered by a superconducting layer. These resonators are designed to be vibra ting wire thermometers adapted for ultra-low-temperature experiments. We de scribe the first tests at 4.2 K. (C) 2000 Elsevier Science B.V. All rights reserved.