The structures of Pb(ZrxTi1-x)O-3/YBa2Cu3O7-delta (PZT/YBCO) bilayer hetero
structure with different thicknesses of PZT sublayer were investigated by x
-ray high resolution diffraction, small angle reflectivity and reciprocal s
pace mapping. The epitaxial films of YBCO and PZT are highly oriented with
the SrTiO3 substrate. The lattice parameter, c, of the YBCO layer was found
to be c = 11.722 +/- 0.001 Angstrom, which is 0.5% larger than that of the
bulk one. The lattice parameter, c, of the PZT layer is c = 4.108 +/- 0.00
1 Angstrom, indicating that the composition of the samples was Pb(Zr0.51Ti0
.49)O-3 The interface roughness of the YBCO/STO and YBCO/PZT, as well as th
e surface roughness was obtained. It was found that there existed an undesi
gned layer on the top of the PZT layer. The effect of the crystalline quali
ty of the STO substrate on the quality of the YBCO and PZT epitaxial films
is discussed.