Effects of fluorine addition on driving force for CVD diamond growth

The driving force for the diamond growth from the vapor phase with fluorine addition was studied according to a non-equilibrium thermodynamic coupling model. There exists a temperature range that the driving force for diamond growth is positive but that for activated graphite is negative. Inside the temperature range, the growth of diamond under low pressures is possible. The effects of fluorine content on driving force for the diamond growth wer e also discussed. The theoretical results can offer quantitative prediction s for optimizing experimental conditions. (C) 2000 Elsevier Science S.A. Al l rights reserved.