Projective phase diagrams for CVD diamond growth from C-H and C-H-O systems

Phase diagrams for chemical vapor deposition (CVD) diamond growth from C-H and C-H-O systems were calculated according to the non-equilibrium thermody namic coupling model. As compared with a large quantity of experimental fac ts, the theoretical predictions agreed well with the experiments. The theor etical results can not only solve the conflict between the classical equili brium thermodynamics and CVD diamond growth under low pressure, but also gi ve quantitative predictions for optimizing experimental conditions. (C) 200 0 Elsevier Science S.A. All rights reserved.