Laser-focused atomic deposition - nanofabrication via atom optics

In conventional molecular-beam epitaxy, atoms from a diffuse source randoml y impinge upon a surface, accumulating in atomic layers or islands. We have recently demonstrated an enhancement of this process, in which the traject ories of the atoms are controlled with nanometer-scale resolution during de position. Using the forces exerted by laser light tuned near an atomic tran sition, an array of 'atom lenses' is formed, which focus, or concentrate th e atoms into an array of lines or dots with size as small as 30 nm. This ne w technique represents a novel form of nanofabrication that can create nano meter-scale structures in parallel over a large (millimeter-size) area with out the use of any resist or pattern-transfer techniques. (C) 2000 Elsevier Science S.A. All rights reserved.