Dn. Bose et al., Determination of well widths in a MOVPE-grown InGaAs/InP multi-quantum well structure using SIMS and photoluminescence, APPL SURF S, 158(1-2), 2000, pp. 16-20
The well and barrier widths of MOVPE-grown In1-xGaxAs/InP (x = 0.47) quantu
m well (QW) structures have been examined by secondary ion mass spectroscop
y (SIMS). The well widths varying from 25 to 150 Angstrom were also estimat
ed through photoluminescence (PL) measurements. It was found that the diffe
rences in estimation of well width by PL and SIMS are due to differences in
sputtering rates between InGaAs and InP during SIMS measurements, the rate
being found to be 1.38-1.97 times less for the former. The presence of int
erfacial layers of similar to 2 monolayers width between well and barrier w
ith low sputtering rate was also inferred. (C) 2000 published by Elsevier S
cience B.V. All rights reserved.