A CeO2 thin film has been subjected to Ar+ bombardment at 298 K to induce t
he reduction of its outmost layers by preferential removal of oxygen. An XP
S study of the altered layer at normal and grazing angle has been carried o
ut. The Factor Analysis (FA) of the XPS spectra of this Art reduced film sh
ows that it has a stoichiometry close to Ce2O3, being Ce3+ the dominant spe
cies at both collection angles. Simultaneously, the Ols spectra depict a la
teral peak whose relative intensity is higher for those spectra recorded at
grazing angle. Exposure to successive doses of O-2 at 298 K of the reduced
layers produces the increase of the O/Ce ratio and a progressive reoxidati
on of Ce3+ into Ce4+ as determined by FA of the Ce3d spectra. Simultaneousl
y, the lateral component at the Ols peak also decreases, thus discarding th
at it is due to surface contamination by -OH or similar species, as previou
sly suggested in the literature. After exposure to a high pressure of oxyge
n(ca. 1 Torr), the XPS spectrum obtained at a normal collection angle shows
an almost complete oxidation of the film to CeO2. However, in the spectrum
at grazing angle, Ce3+ species and the lateral component of oxygen are sti
ll detected. The lateral Ols component is tentatively attributed to oxygen
ions with unusual coordinations in a defective CeOx (x < 2) structure, whil
e the remaining Ce3+ ions might be due to fully coordinated species. Enrich
ment of the surface of the defective cerium oxide with these oxygen species
seems to be a result of the same structural rearrangements that favour the
observed stabilization of Ce3+ species at the surface. (C) 2000 Elsevier S
cience B.V. All rights reserved.