N. Okuda et al., Low-temperature deposition of SrRuO3 thin film prepared by metalorganic chemical vapor deposition, JPN J A P 1, 39(2A), 2000, pp. 572-576
SrRuO3 thin films were prepared on (100) LaAlO3 substrates by metalorganic
chemical vapor deposition (MOCVD) at various deposition temperatures from 5
50 degrees C to 750 degrees C. The composition of the film can be controlle
d by monitoring the composition of the input source gas. Below 600 degrees
C, the degree of a-axis orientation of the film gradually decreased with de
creasing deposition temperature. However, the resistivity of the film was a
lmost the same fur that reported fur the single crystal and was independent
of the deposition temperature when the Ru/(Ru + Sr) ratio of the film was
0.5. The film had almost the same value for the film thickness from 30 to 2
50 nm deposited at 750 degrees C. Moreover, it increased with the Ru/(Ru Sr) ratio below 0.45.