We have investigated a novel method utilizing the He atom scattering (HAS)
technique which is most sensitive to surface adsorbates, and is complementa
ry to temperature programmed desorption (TPD). The principle of this novel
method is discussed. The novel technique is demonstrated by monitoring the
coverage of desorbing species from a Pt(111) surface irradiated with hypert
hermal ethane molecules. The new technique will provide us with information
on the binding energy and concentration of adsorbed species at very low co
verage which cannot be obtained with the conventional TPD process.