Diamond growth mechanisms in various environments

The goal of this study was to improve our understanding of diamond growth r eactors. Direct relationships were set up between key parameters at a micro scale level and diamond film characteristics. The coupled action of plasma variables, such as microwave power density, substrate temperature, and perc entage of methane, on the density of the key species that control diamond g rowth was studied by spectroscopic diagnostics and modeling. The influence of local conditions on the domain of validity of the Van der Drift model, w hich describes texture development from a random distribution of diamond nu clei, is discussed. The results suggested that different chemical kinetic m odels, which depend on plasma conditions, must be used to describe "diamond " growth by chemical vapor deposition. (C) 2000 The Electrochemical Society . S0013-4651(99)08-102-1. FLU rights reserved.