Patterned deposition of sol-gel thin films using an airbrush

Citation
An. Watkins et Fs. Ligler, Patterned deposition of sol-gel thin films using an airbrush, ANAL LETTER, 33(9), 2000, pp. 1899-1912
Citations number
21
Categorie Soggetti
Chemistry & Analysis","Spectroscopy /Instrumentation/Analytical Sciences
Journal title
ANALYTICAL LETTERS
ISSN journal
00032719 → ACNP
Volume
33
Issue
9
Year of publication
2000
Pages
1899 - 1912
Database
ISI
SICI code
0003-2719(2000)33:9<1899:PDOSTF>2.0.ZU;2-4
Abstract
In this article, we present a method to pattern glass substrates with sol-g el derived thin films. This method is based on the aerosol deposition of so l-gel precursor solutions using an inexpensive, commercially available airb rush. The technique was demonstrated using Cy5-doped sol-gel thin films for the creation of wavelength conversion devices. The films deposited were me chanically and chemically rigid, and patterns could be achieved with a reso lution limit of approximately 250 mu m Constructing channel waveguides was also attempted using both zirconium- and titanium-based sol-gel thin films. Deposited thin films of these materials showed graininess that Limited the ability to couple Light into the films and increased the observed scatter. However, light was successfully coupled into the titanium-based sol-gel fi lm using small lens-like structures created on the glass surface.