(AlAs)(n)/(AlP)(n) (n=1-3) short-period superlattices were grown by gas-sou
rce migration-enhanced epitaxy at a low growth temperature. Dynamical-theor
y simulations of x-ray diffraction patterns were conducted and showed good
agreement with experimentally obtained patterns. In addition, cross-section
al transmission electron microscopy analysis was performed, which confirmed
that high-quality short-period superlattices of AlAs/AlP were grown. (C) 2
000 American Institute of Physics. [S0003-6951(00)02326-3].