The avalanche multiplication and excess noise properties of a range of subm
icron Si diodes have been investigated. In these thin diodes the excess noi
se is found to fall below that predicted by conventional local noise theory
. Modeling of the multiplication and excess noise using a recurrence method
, which includes the dead space for carrier ionization, gives good agreemen
t with experiment. This suggests that the dead space can reduce the excess
noise in submicron Si diodes. (C) 2000 American Institute of Physics. [S000
3-6951(00)02026-X].