Persistent layer-by-layer sputtering of Au(111)

Persistent layer-by-layer removal of Au(111) during Ar+ ion irradiation was observed in a real-time x-ray scattering study. Over 100 specular beam int ensity oscillations were measured. For a given ion energy, a smoother surfa ce morphology is obtained when the ion flux is reduced. For a fixed erosion rate, ion energy in the range of 70-500 eV does not have a strong influenc e on the evolution of surface morphology. Diffuse scattering measurements s how the development of features with a characteristic lateral length scale on the surface during ion irradiation. (C) 2000 American Institute of Physi cs. [S0021-8979(00)06213-7].