R. Sudharsanan et al., DEPOSITION AND CHARACTERIZATION OF CDZNTE THIN-FILMS FOR GAS MICROSTRIP DETECTORS, IEEE transactions on nuclear science, 44(3), 1997, pp. 665-670
Deposition, characterization, fabrication and performance of gas micro
strip detectors (GMDs) using CdZnTe thin films to control surface resi
stivity are reported. CdZnTe thin films deposited on glass or on flexi
ble plastic substrates are attractive for GMDs since CdZnTe bulk resis
tivity varies in the range 10(9) to 10(11) ohm-cm and CdZnTe films wit
h good uniformity can be deposited over large areas using inexpensive
deposition techniques. Metalorganic chemical vapor deposition was used
to form CdZnTe thin films on glass and flexible plastic substrates. T
he sheet resistance for 1 mu m thick CdZnTe film on glass varied in th
e range 10 to 10(13) ohm/square depending on the growth conditions. GM
Ds were fabricated using CdZnTe films deposited on glass substrates an
d tested for energy response to Fe-55 X-rays. The well-resolved peaks
(5.9 keV X-ray and 2.9 keV escape peak) clearly show the ability to su
ccessfully fabricate CdZnTe thin films on GMDs.