Y. Li et al., Design and fabrication of diffractive microlens arrays on Si substrates for 128 X 128 PtSi infrared focal plane arrays, J INF M W, 19(3), 2000, pp. 197-200
128X128 diffractive microlens array was designed by considering the correla
tive optical and processing parameters for 3-5 mu m wavelength range with a
microlens diameter of 50 mu m.. The lens f number and array pitch are f/2.
5 and 50 mu m, respectively: The diffractive microlens arrays were fabricat
ed on the surface of Si substrates by successive photolithography and Ar+ i
on-beam-etching technique. The practical processes and fabrication method w
ere discussed. The optical characteristics and the surface relief structure
of the 128X128 Si diffractive microlens array were measured.