Electrodeposition for the synthesis of microsystems

Electroplating is an emerging technique for the production of microsystems. This is due to advantages such as high rate of deposition, high resolution , high shape fidelity, simple scalability, and good compatibility with exis ting processes in microelectronics. Materials ranging from high-conductivit y metals over soldering connections to ferromagnets can be deposited. In th is paper the basics of electroplating are reviewed and examples of recent a pplications of electroplating in the processing of microsystems are present ed.