S. Reyntjens et R. Puers, Focused ion beam induced deposition: fabrication of three-dimensional microstructures and Young's modulus of the deposited material, J MICROM M, 10(2), 2000, pp. 181-188
In this work, some of the possibilities of focused ion beams for applicatio
ns in microsystem technology are explored. Unlike most previous studies, th
e emphasis is on 'additive' techniques, i.e. localized maskless deposition
of metals and insulators. More precisely, we will show the possibility of f
abricating small three-dimensional structures, using focused ion beam depos
ition of silicon oxide. Deposition examples will show that the technique is
most promising for small post-processing steps or prototyping, because of
its high degree of flexibility. Furthermore, an investigation into the mech
anical properties of the deposited material is presented. More specifically
, the Young's modulus of the deposited silicon oxide is determined.