Low-cost piezoresistive silicon load cell independent of force distribution

A silicon load cell (force sensor) that is based on a new operating princip le is presented. The force is measured bq compressing a meander-like strain gage. A second strain gage, which is not loaded, is used for temperature c ompensation and for compensation of bending and stretching stresses in the chip. Also, the same changes in a zero-load resistor values are eliminated. It is shown that the output of the bridge is a linear function of the tota l force and independent of the force distribution on the silicon chip. Meas urements up to 1000 kg show a linear response and a short-term repeatabilit y to within 0.1%. Creep after 30 min within 1.2%.