An electromechanical mixer using silicon micromechanical capacitors and radio-frequency functions

In conjunction with a remote-controlled smart-sensors project (Villegas M, Bildstein P and Nicole P 1997 Translateur de frequence micro-ondes pour cap teur intelligent autonome Proc. 10eme Journees Nationales Microondes (St Ma lo, 21-23 May 1997) pp 270-1). this study concerns the validation of a radi o-frequency microelectromechanical system combining micromechanical capacit ive functions and microwave data communication functions. In this project. we have focused on the back-modulation function used for d ata re-emission. We decided to develop this function with a microelectromec hanical mixer made as a passive microwave frequency shifter using an integr ated silicon micromechanical capacitive structure. The principles. together with electromechanical considerations, the technology of the silicon impla ntation, and some first experimental results are described in this paper. T he main interest lies in the characterization of the device: both electrica l and mechanical properties are tested in parallel to assist us in improvin g the system and defining a new micromechanical frequency-translator protot ype.