This paper presents recent results on the development and control of a micr
ogripper based on flexure joints, fabricated by LIGA and instrumented with
semiconductor strain-gauge force sensors. The microgripper is the end-effec
tor of a workstation developed to grasp and manipulate tiny objects such as
the components of a typical biomedical microdevice.
The development of the force control in the microgripper is of fundamental
importance in order to achieve the dexterity and sensing capabilities requi
red to perform assembly tasks for biomedical microdevices.
As a step towards the definition of the force control strategy, system iden
tification techniques have been used to model the microgripper. Results ind
icate that a proportional integral (PI) controller could be used to assure,
at the same time, closed-loop stability of the system, and a bandwidth sui
table for the intended applications. The force control is based on strain-g
auge sensors which have been integrated in the microgripper and experimenta
lly characterized. Sensor response in the idling condition and during grasp
showed that they can provide useful information for force control of the m
icrogripper.