Modelling of micropumps using unimorph piezoelectric actuator and ball valves

This paper presents a general approach to the problem of modelling membrane micropumps. The proposed approach is aimed at predicting the performance o f a specific micropump versus the working frequency, according to its geome trical and mechanical characteristics. This can be very useful during the d esign process of microfluidic devices including several membrane micropumps connected in a complex layout. The developed model has been applied to the specific class of micropumps ba sed on piezoelectric unimorph actuator and ball check valves. Model predict ions agree with the experimental results obtained on prototypes made in the authors laboratory.