Enhancement of elementary displaced volume with electrostatically actuateddiaphragms: application to electrostatic micropumps

This paper presents two ways to increase the elementary volume which an ele ctrostatic micropump can move. These findings can be used to optimize micro pumps in terms of volume stroke. First, the main characteristics of the electrostatic actuator are identifie d via a simple model based on a rigid plate attached to a spring. Then two different ways to increase the volume stroke by diaphragm deflection are pr esented. The first is explained via experimental results, In this case, the diaphragm ii used in a hard mode by pulling it to the electrode. The secon d is explained via simulation and is presented with normalized results. Her e, by modifying the electrode shape, the pull-in limit can be raised and a larger volume can be achieved.