InP-based MOEMS and related topics

Authors
Leclercq, JL Garrigues, M Letartre, X Seassal, C Viktorovitch, P
Citation
Jl. Leclercq et al., InP-based MOEMS and related topics, J MICROM M, 10(2), 2000, pp. 287-292
Citations number
14
Categorie Soggetti
Mechanical Engineering
Journal title
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
ISSN journal
09601317 → ACNP
Volume
10
Issue
2
Year of publication
2000
Pages
287 - 292
Database
ISI
SICI code
0960-1317(200006)10:2<287:IMART>2.0.ZU;2-O
Abstract
Potential applications of InP and related compound semiconductors for the r ealization of micro-opto-electro-mechanical systems are presented. Specific features and advantages of InP and related material based micromachining s how that the optical capabilities of InP-air based microcavities can be con siderably enhanced.