We devised a method for the reliable electrical testing of nanoscale wire a
rrays using conducting probe atomic force microscopy (AFM) in ambient condi
tions. A key requirement of this approach is the formation of highly reprod
ucible electrical contacts between the conducting tip and the sample. We di
scuss the basic mechanical and electrical criteria of nanocontacts and deri
ve a force-controlled protocol for the formation of low-ohmic contacts. Tip
s sputter coated with platinum provided the mechanical stability for both t
apping-mode imaging and the formation of low-ohmic contacts on gold samples
. Nanostructures on the sample were identified by topographic imaging and s
ubsequently probed using the AFM tip as a mobile electrode. We measured res
istivities in arrays of nanowires or local potentials of wires within elect
rical circuits, and detected electrical failures, thermal gradients, and sm
all geometrical variations. The ability of this instrument to address elect
rical characteristics with high spatial resolution makes it a powerful tool
fur lithography developments and on-chip monitoring of nanoscale circuits.
(C) 2000 American Vacuum Society. [S0734-211X(00)03103-6].