F. Aqariden et al., Real-time composition control using spectral ellipsometry in growth of Hg1-xCdxTe by molecular beam epitaxy, J VAC SCI B, 18(3), 2000, pp. 1381-1384
Real-time composition control using spectral (or spectroscopic) ellipsometr
y (SE) in the growth of long-wavelength infrared (LWIR) Hg1-xCdxTe (x simil
ar to 0.225) on Cd0.96Zn0.04Te(211) B by molecular beam epitaxy (MBE) was i
nvestigated. Excellent compositional reproducibility among the 10 LWIR Hg1-
xCdxTe growth runs was demonstrated with the aid of SE, with the average co
mposition being x = 0,225 acid the standard deviation in x being 0.00042, t
he lowest figure that has ever been reported. The ability of MBE to switch
from one composition to another on demand and with first pass success using
SE is also demonstrated. (C) 2000 American Vacuum Society. [S0734-211X(00)
04203-7].