Preparation and characterization of metalorganic decomposition-derived SrBi2Ta2O9 thin films

We report the preparation and characterization of ferroelectric SrBi2Ta2O9 (SBT) thin films derived from metalorganic decomposition (MOD) along with t he spin-on technique. Film composition was analyzed by inductively coupled plasma (ICP) analysis and Rutherfold backscattering (RBS) spectroscopy. X-r ay diffraction, scanning electron microscopy (SEM) and electrical measureme nts showed well-crystallized SET thin films with uniform surface and excell ent ferroelectric properties after annealing in O-2 above 750 degrees C. Th e remanent polarization (P-r) at 3 V stimulus voltage was 6-7 and 9-10 mu C /cm(2) for 330 nm-thick films annealed at 750 degrees C and 800 degrees C. The coercive field was only around 15 kV/cm. Good resistance against fatigu e and excellent retention properties were observed up to 10(11) bipolar swi tching cycles and 7 x 10(5) s, respectively. (C) 2000 Elsevier Science B.V. All rights reserved.