K. Yamamoto et al., Improvement of light collection efficiency of lens-coupled YAG screen TV system for a high-voltage electron microscope, MICROSC RES, 49(6), 2000, pp. 596-604
A new lens coupling television (TV) system using a YAG (Yttrium Aluminum Ga
rnet: Y3Al5O12: Ce3+) single crystal screen has been developed for a high-v
oltage electron microscope (HVEM), and its performance is examined. The sys
tem, using a combination of YAG and lenses, is less damaged by high-energy
electron irradiation and reduces the influence of X-rays on the image. YAG
screens have not been used for lens-coupling systems, because the high refr
active index (n = 1.84) of YAG results in a low light collection efficiency
for emitted light. This disadvantage is overcome by combining a thin YAG d
isk screen (thickness; 100 mu m) with a glass hemisphere whose refractive i
ndex is 1.81. We found that the light intensity is almost the same as that
obtained with a conventional P22 powder screen and lenses system. The resol
ution is about 55 mu m on the YAG screen, and this value is 1.3 times highe
r than that measured by the conventional system. Shading and distortion do
not affect TV observation. Detection quantum efficiency, obtained after cor
rection of the channel mixing effect, is about 0.1. (C) 2000 Wiley-Liss, In
c.