The use of X-ray optics allows for elemental analysis of small samples and
small areas: particles, inclusions and elemental distributions. Previously,
collimators have been used to limit the X-ray beam diameter. However, in r
ecent years, glass capillary optics have come into use. X-rays propagate th
rough a capillary optic by total reflection from the inner wall of the capi
llary. Furthermore, different types of capillary optics, mono-capillary and
poly-capillary lenses, with distinct excitation properties are now availab
le. Capillary optics alter the input tube spectrum due to the energy depend
ence of the critical angle of total reflection. Minimum beam diameter and t
he energy dependence of the beam diameter are also influenced by the condit
ions for total reflection. In this paper, the exciting performance of diffe
rent X-ray optics are examined and compared to collimators.