Solid state analysis with the new Leipzig high-energy ion nanoprobe

The high-energy ion nanoprobe LIPSION at the University of Leipzig has been operational since October 1998. The ultrastable single ended 3.5MV SINLETR ON(TM) accelerator supplies the H+ or He+ ion beam. A magnetic scanning sys tem moves the focused beam across the sample. At present, a resolution of 1 50 nm in the low current mode and 300 nm at 5 pA could be achieved. The UHV grade experimental chamber is equipped with electron-. energy dispe rsive X-ray-, and particle detectors. They can be used simultaneously to an alyse the sample by means of PIXE (particle induced X-ray emission), RES (R utherford backscattering) and in the case of thin samples STIM (scanning tr ansmission ion microscopy). A goniometer allows the application of channeling measurements in single cr ystals in combination with these methods. The detection limits depend on the elements to be analysed and range from ( 1000 ... 1)mu g/g relative and (1...0.01)pg absolute. The analysis is nonde structive, but the sample has to be vacuum resistant. Applications of the n anoprobe in the field of semiconductor research, biomedicine, and archaeolo gy will be described.