Investigation of Co/Cu/NiFe-multilayers by X-ray reflectometry and diffraction

Structural properties of sputtered multilayers with different Co-, Cu- and NiFe-sequences of about 2 nm individual layer thickness were investigated b y means of synchrotron radiation techniques. Correlations between the laver combination and structural parameters such as layer thickness and rms inte rface roughness derived from specular scans were obtained, whereas the late ral characteristics of the interface morphology investigated by diffuse sca ttering were found to be similar for all multilayers. Wide angle diffractio n measurements yielded lattice plane information, e.g. size-strain effects due to profile broadening and predominating (111) fibre textures.