XPS depth profile analysis of a thin non-conducting titanate superlattice

New BaTiO3-SrTiO3 (BTO-STO)-superlattices which may be interesting for futu re electronic applications have been investigated by X-ray photoelectron sp ectroscopy (XPS) depth profiling. At first XPS measuring conditions were op timized for that non-conducting and thin layer systems (21 nm double layer thickness) considering the practical instrumental limitations. Second a sim ulation of the sputtering process for the concrete experimental conditions were done by a dynamic T-DYN code. By comparison of experimental and simula ted depth profiles the maximum sample roughness could be estimated to be in the range of 2 nm.