Various K-, L- and M-shell X-ray production cross sections are measured for
heavy ion impact on elements in the range Z(2) = 13 to 83. The ion species
range from Z(1) = 10 to 36, and ion energies from 1 to 16 MeV are used. En
hanced cross sections are observed when the projectile K- or L- binding ene
rgy is similar to the energy of the target K-, L- or M-shell. This effect i
s used to improve the analysis sensitivity for selected elements. As an exa
mple trace analysis of Fe in glass with V, Mn, Co and Ni ions is investigat
ed. Results are compared with proton induced X-ray emission analysis on the
same samples. In these samples Fe-K-alpha X-ray production is similar for
ii-radiation with 3 MeV protons and 14MeV Ni ions, However the signal to ba
ckground ratio is four times higher for the irradiation with Ni ions as com
pared to irradiation with protons. Advantages and dl drawbacks of heavy ion
induced X-ray emission for quantitative analysis compared to proton induce
d X-ray emission analysis an discussed.