A method for analysis of carbon-containing thin films by using surface enha
nced Raman spectroscopy (SERS) is described. Thin films of boron nitride or
silicon carbide which are deposited on carbon filaments were coated additi
onally with silver nanoparticles. A very thin plasma polymer film was depos
ited on the silver particles to give a better long time stability. Using th
ese layers, very intensive carbon band were detected.