Intrinsic point defeats and their control in silicon crystal growth and wafer processing

Citation
R. Falster et Vv. Voronkov, Intrinsic point defeats and their control in silicon crystal growth and wafer processing, MRS BULL, 25(6), 2000, pp. 28-32
Citations number
15
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
MRS BULLETIN
ISSN journal
08837694 → ACNP
Volume
25
Issue
6
Year of publication
2000
Pages
28 - 32
Database
ISI
SICI code
0883-7694(200006)25:6<28:IPDATC>2.0.ZU;2-G