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ITA
ENG
Intrinsic point defeats and their control in silicon crystal growth and wafer processing
Authors
Falster, R
Voronkov, VV
Citation
R. Falster et Vv. Voronkov, Intrinsic point defeats and their control in silicon crystal growth and wafer processing, MRS BULL, 25(6), 2000, pp. 28-32
Citations number
15
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
MRS BULLETIN
ISSN journal
08837694 →
ACNP
Volume
25
Issue
6
Year of publication
2000
Pages
28 - 32
Database
ISI
SICI code
0883-7694(200006)25:6<28:IPDATC>2.0.ZU;2-G