Self-consistent simulation of electron cyclotron resonance plasma discharge

Microwave fields in an extended electron cyclotron resonance (ECR) plasma r eactor were analyzed in the resonant cavity from Maxwell's equations, and a formalism of microwave absorption was investigated at the resonance zone w ith plasma kinetic theory and simulated using a two-dimension computer hybr id-code. The results indicated that there are three typical power depositio n profiles over the entire parameter range: (1) the parabolic shape: peakin g on axis and decreasing slowly along the radius, (2) the trumpet shape: pe aking on axis and decreasing quickly along the radius, and (3) the camel sh ape, i.e., a hollow distribution. The spatial distributions of plasma param eters (plasma density, electron temperature, ionization rate, etc.) would b e significantly influenced by the microwave power absorption profile. (C) 2 000 American Institute of Physics. [S1070- 664X(00)02906-2].