A quantum cascade laser fabricated using planar native-oxide layers

We present work on the application of a thermal wet oxidation process to th e fabrication of quantum cascade lasers. The native oxide of the Al0.48In0. 52As upper cladding layer was formed and used to provide electrical and opt ical confinement for lasers operating at lambda approximate to 5 mu m. Init ial results include 1.4 W peak output power and 0.69 W/A slope efficiency a t 10 K, and a reduced temperature dependence of the threshold current densi ty (T-0=142) K. (C) 2000 American Institute of Physics. [S0003-6951(00)0212 7-6].