We determine the energy barrier height for the formation of positively char
ged phosphorus vacancies in InP(110) surfaces using the rate of formation o
f vacancies measured directly from scanning tunneling microscope images. We
found a barrier height in the range of 1.15-1.21 eV. The barrier height de
creases with increasing carrier concentration. These results are explained
by a charge separation during the vacancy formation process. (C) 2000 Ameri
can Institute of Physics. [S0003-6951(00)02027-1].