Amorphous carbon and carbon nitride films synthesized by electrolysis of nitrogen-containing liquid

Nitrogen-containing liquids N,N-dimethylformamide [HCON(CH3)(2)] and acrylo nitrile (CH2CHCN) were selected as electrolytes in attempt to electrochemic ally deposit carbon nitride films on silicon substrates at atmospheric pres sure and low temperature. The composition and bonding states in these films have been characterized by using X-ray photoelectron spectroscopy (XPS), R aman, and Fourier transform infrared (FTIR) measurements. It was evidenced that hydrogenated amorphous carbon nitride (alpha-CNx:H) films could be syn thesized in acrylonitrile liquid, however, in N,N-dimethylformamide, only a lpha-C:H:O films were obtained. These results indicate that electrodepositi on of CNx films in the liquid phase is possible, and the selection of elect rolytes and optimization of experimental parameters are the key factors in the liquid deposition process. (C) 2000 Elsevier Science S.A. All rights re served.