Local strain on an atomic scale, as well as the size and the shape of InP q
uantum dots (QDs) embedded in GaInP, have been measured directly from high-
resolution electron microscopy images. There is a strong spatial variation
in strain within a QD. A large part of the misfit strain is distributed in
the GaInP matrix surrounding the QDs, especially in the case of small spaci
ng between the QD layers. The strain distribution varies significantly with
the thickness of the GaInP spacer layers between QD layers. The compressiv
e strain within the QDs decreases with decreasing spacing between the QD la
yers. This contributes to an increasing red shift of photoluminescence ener
gy peak positions of QDs of multi-layers with decreasing thickness of the s
pacer layers between the QD layers in comparison with that of single layer
QDs. (C) 2000 American Institute of Physics. [S0021-8979(00)05414-1].