The parameters of the sensor layout and sensitivity considerations are disc
ussed. The anisotropic magnetoresistive effect of DC-sputtered Ni 81%-Fe 19
% films has been increased up to Delta p/p = 3.93% at 50 nm thickness and a
sensitivity of 500 mu V/mu T can be achieved by an elliptically shaped sen
sor layout. (C) 2000 Elsevier Science B.V. All rights reserved.