Reduced-order dynamic macromodels to describe the behavior of microelectrom
echanical system structures with stress stiffening are presented in this pa
per. The approach is based on potential and kinetic energy representations
of selected fundamental modes of motion, modified to take account of stress
stiffening. Energy data are calculated by several finite-element runs, fit
ted to polynomial functions, and used to develop the equations of motion ac
cording to Lagrangian mechanics. Accuracy and restrictions of these macromo
dels will be shown.